ASML

Role: Senior Mechanical Engineer

Primary Projects: 

• Reticle Motion

• Balance Mass

• Reticle Handler

• Reticle Control Rack

 

At ASML, I worked primarily on the Reticle Stage of the EXE5000 system. The Reticle stage exists in a dark vacuum so there are thermal challenges due to the lack of convection and fast moving components. One of my focuses was measuring motion of the balance mass inside the vacuum measuring its position and velocity. 

 

I also did 3D Electrical Layouts and large control rack design.